The Heated Part Concept Standard 200 and 300 mm Platen Heaters
CAS has 200 and 300 mm aluminum platen heaters in stock to quickly solve wafer fabrication needs. Customers can now save thousands of dollars with off-the-shelf designs since there are no additional costs for engineering,
tooling or casting mold creation.
CAS’s platen heater design is ideal for prototype machine trials or engineering experiments as well as temporary repairs until custom heaters can be manufactured. CAS’s platen heaters provide a complete turnkey solution and are available in anodized finish, or in bare machined aluminum 356 with optional add-on features.
The stock anodized cast aluminum platen heaters are complete, ready to install parts and are available for shipment within one business day.
Applications
• Semiconductor processing
• Semiconductor research and development
Features and Benefits
Stock delivery
• WR200-2A and WR300-2A ship within one business day to reduce down time
• Assures a cost effective option for 200 and 300 mm wafer processing
World class performance
• “Cast-in” reliability assures long product life
• Operating temperatures up to 752°F (400°C) for a wide range of process applications
• Surface temperature uniformity of ±0.3% of set point assures wafer processing accuracy
Specifications:
Standard Features (All models)
• Material: Aluminum alloy 356
• Surface Flatness: < 0.0005 in. (0.013 mm)
• Surface temperature uniformity: ±0.3% of set point based on measurements at laboratory ambient conditions
• Cleaning: IPA wipe down with tech cloth
• Hard anodize thickness: 0.002 in. (0.05 mm) per MIL-A-8525, Type III, Class 1 (models WR200-2A and WR300-2A only)
Specifications—Model WR200-2A (Anodized) and Model WR200-2B (Bare)
• Diameter: 9 in. (228.6 mm)
• Thickness: 1.25 in. (31.75 mm)
• (3X) Lift Pin Holes diameter 0.125 in. (3.2mm) equally spaced 120° on 3.25 in. (82.55 mm) perfect circle diameter
• (1X) Thermocouple hole diameter 0.066 in. (1.68 mm) with 1⁄16 NPT tap for fitting
• “Cast-in” cable heater rated 1681 W at 208V (or 2241 W when operated at 240V)
WR200-2A SERIES Platen With Hardcoat Anodize Finish
• Reference drawing below
• Rating: Typical 208V, 1681 W, maximum 240V, 2241 W
• Part is ultrasonic washed followed by IPA wipe down prior to packaging
• Delivery 6-8 weeks
| Item |
Code Number |
| No thermocouple included | WR200-2A |
| Thermocouple, Type K, 6 in. (152 mm) sheath + fitting | WR200-3A |
| Thermocouple, Type J, 6 in. (152 mm) sheath + fitting | WR200-4A |
| Thermocouple, Type K, 12 in. (305 mm) sheath + fitting | WR200-5A |
| Thermocouple, Type J, 12 in. (305 mm) sheath + fitting | WR200-6A |
WR200-2B SERIES Platen With Bare Machined Aluminum Finish
• Reference drawing below, except no hardcoat anodize will be provided
• Rating: Typical 208V, 1681 W, maximum 240V, 2241 W
• Part is ultrasonic washed followed by IPA wipe down prior to packaging
• Delivery 4-6 weeks
| Item |
Code Number |
| No thermocouple included | WR200-2B |
| Thermocouple, Type K, 6 in. (152 mm) sheath + fitting | WR200-3B |
| Thermocouple, Type J, 6 in. (152 mm) sheath + fitting | WR200-4B |
| Thermocouple, Type K, 12 in. (305 mm) sheath + fitting | WR200-5B |
| Thermocouple, Type J, 12 in. (305 mm) sheath + fitting | WR200-6B |
Specifications—Model WR300-2A (Anodized) and Model WR300-2B (Bare)
• Diameter: 13.78 in. (350 mm)
• Thickness: 1.575 in. (40 mm)
• (3X) Lift Pin Holes diameter 0.125 in. (3.2mm) equally spaced 120° on 10 in. (254 mm) perfect circle diameter
• (1X) Thermocouple hole diameter 0.128 in. (3.25 mm) with 1⁄8 NPT tap for fitting
• “Cast-in” cable heater rated 3350 W at 208V
WR300-2A SERIES Platen With Hardcoat Anodize Finish
• Reference drawing below
• Rating: Typical 208V, 3350 W
• Delivery 6-8 weeks
• Reference drawing below
• Rating: Typical 208V, 3350 W
| Item |
Code Number |
| No thermocouple included | WR300-2A |
| Thermocouple, Type K, 6 in. (152 mm) sheath + fitting | WR300-3A |
| Thermocouple, Type J, 6 in. (152 mm) sheath + fitting | WR300-4A |
| Thermocouple, Type K, 12 in. (305 mm) sheath + fitting | WR300-5A |
| Thermocouple, Type J, 12 in. (305 mm) sheath + fitting | WR300-6A |
WR300-2B SERIES Platen With Bare Machined Aluminum Finish
• Reference drawing below, except no hardcoat anodize will be provided
• Rating: Typical 208V, 3350 W
• Part is ultrasonic washed followed by IPA wipe down prior to packaging
• Delivery 4-6 weeks
| Item |
Code Number |
| No thermocouple included | WR300-2B |
| Thermocouple, Type K, 6 in. (152 mm) sheath + fitting | WR300-3B |
| Thermocouple, Type J, 6 in. (152 mm) sheath + fitting | WR300-4B |
| Thermocouple, Type K, 12 in. (305 mm) sheath + fitting | WR300-5B |
| Thermocouple, Type J, 12 in. (305 mm) sheath + fitting | WR300-6B |
